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Operation System error 665 with VLDB backup

Has anyone seen the following error while doing backups? We have tried different LUNS from different storage pools and are seeing the same result.

Here is the error message: Operating system error 665(The requested operation could not be completed due to a file system limitation).

NTFS Compression is not enabled on the drives. This failure usually comes when the backup is about half completed. I believe when the backup file size is extended again. We are striping against eight files. The database is 60+ TB. I also saw some references to file fragmentation and I see that these drives show 0% percent.

I also saw several references to DBCC CHECKDB and sparse files. We are just doing a full backup and not any DBCC CHECKDBs. The goal would be to do this on a secondary server until any errors are recorded.